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Design and simulation of a MEMS analog micro-mirror with improved rotation angle

Crossref DOI link: https://doi.org/10.1007/s00542-018-4083-z

Published Online: 2018-08-14

Published Print: 2019-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Afrang, Saeid

Mobki, Hamed

Hassanzadeh, Malek

Rezazadeh, Ghader
Funding

Funding for this research was provided by:

Urmia University
License Information

Text and Data Mining valid from 2018-08-14
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Article History

Received: 17 May 2018

Accepted: 6 August 2018

First Online: 14 August 2018