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Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption

Published Online: 2018-08-31

Published Print: 2022-06

Authors

Shaun, Ferdous

Nefzaoui, Elyes

Marty, Frederic

Cesar, William

Bourouina, Tarik
Funding

Funding for this research was provided by:

H2020 European Institute of Innovation and Technology (No 644852)
License Information

Text and Data Mining valid from 2018-08-31

Version of Record valid from 2018-08-31
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Article History

Received: 24 July 2017

Accepted: 21 August 2018

First Online: 31 August 2018

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