Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
Crossref DOI link: https://doi.org/10.1007/s00542-018-4118-5
Published Online: 2018-09-06
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Erbes, Andreja
Wang, Wentao
Weinstein, Dana
Seshia, Ashwin A. http://orcid.org/0000-0001-9305-6879
Funding for this research was provided by:
Qualcomm European Studentships in Technology
National Science Foundation (1150493)
Text and Data Mining valid from 2018-09-06
Version of Record valid from 2018-09-06
Article History
Received: 25 October 2017
Accepted: 27 August 2018
First Online: 6 September 2018