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Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators

Published Online: 2018-09-06

Published Print: 2019-03

Authors

Erbes, Andreja

Wang, Wentao

Weinstein, Dana

Seshia, Ashwin A. https://orcid.org/0000-0001-9305-6879
Funding

Funding for this research was provided by:

Qualcomm European Studentships in Technology

National Science Foundation (1150493)
License Information

Text and Data Mining valid from 2018-09-06

Version of Record valid from 2018-09-06
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Article History

Received: 25 October 2017

Accepted: 27 August 2018

First Online: 6 September 2018

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