Design and analysis of perforated MEMS resonator
Crossref DOI link: https://doi.org/10.1007/s00542-018-4207-5
Published Online: 2018-11-23
Published Print: 2021-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Guha, Koushik
Dutta, Hrishikesh
Sateesh, Jasti
Baishya, S.
Srinivasa Rao, K.
Text and Data Mining valid from 2018-11-23
Version of Record valid from 2018-11-23
Article History
Received: 16 June 2018
Accepted: 8 October 2018
First Online: 23 November 2018