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Air damping characteristics of a 2D MEMS electromagnetically driven micro-mirror

Crossref DOI link: https://doi.org/10.1007/s00542-018-4231-5

Published Online: 2018-11-20

Published Print: 2019-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Peng, Mingdi

Zhu, Xinhua

Jiang, Bo https://orcid.org/0000-0002-8401-7445
Zhou, Tong

Su, Yan
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (61805121)

Natural Science Foundation of Jiangsu Province (BK20170850, BK20170853)
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Text and Data Mining valid from 2018-11-20
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Article History

Received: 25 July 2018

Accepted: 14 November 2018

First Online: 20 November 2018