Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction
Crossref DOI link: https://doi.org/10.1007/s00542-018-4239-x
Published Online: 2018-11-28
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nguyen, Chi Cuong
Ngo, Vo Ke Thanh
Le, Hoai Quoc
Li, Wang Long
Text and Data Mining valid from 2018-11-28
Article History
Received: 5 August 2018
Accepted: 21 November 2018
First Online: 28 November 2018