Multi-objective optimization of a circular dual back-plate MEMS microphone: tradeoff between pull-in voltage, sensitivity and resonance frequency
Crossref DOI link: https://doi.org/10.1007/s00542-018-4240-4
Published Online: 2018-11-27
Published Print: 2019-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Saadatmand, Milad http://orcid.org/0000-0002-2968-9871
Kook, Junghwan
Text and Data Mining valid from 2018-11-27
Article History
Received: 1 September 2018
Accepted: 21 November 2018
First Online: 27 November 2018