Contact resistance and lifecycle of a single- and multiple-contact MEMS switch
Crossref DOI link: https://doi.org/10.1007/s00542-018-4279-2
Published Online: 2019-01-02
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Uvarov, Ilia V. http://orcid.org/0000-0002-6882-0625
Marukhin, Nikita V.
Naumov, Victor V.
Funding for this research was provided by:
Russian Foundation for Basic Research (16-37-60065 mol_a_dk)
Text and Data Mining valid from 2019-01-02
Article History
Received: 10 December 2018
Accepted: 17 December 2018
First Online: 2 January 2019