Determination of the stiffness properties of a complex RF MEMS by superposition and finite elements method
Crossref DOI link: https://doi.org/10.1007/s00542-018-4283-6
Published Online: 2019-01-02
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yilmaz, M. Cihat http://orcid.org/0000-0001-7041-9286
Orhan, Sadettin
Text and Data Mining valid from 2019-01-02
Article History
Received: 12 July 2018
Accepted: 19 December 2018
First Online: 2 January 2019