A new MEMS based variable capacitor using electrostatic vertical comb drive actuator and auxiliary cantilever beams
Crossref DOI link: https://doi.org/10.1007/s00542-019-04293-7
Published Online: 2019-01-23
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Afrang, Saeid
Nematkhah, Nooshin
Text and Data Mining valid from 2019-01-23
Article History
Received: 30 September 2018
Accepted: 2 January 2019
First Online: 23 January 2019