Crossmark

Finite element analysis and experimental validation of suppression of span in optical MEMS pressure sensors

Crossref DOI link: https://doi.org/10.1007/s00542-019-04333-2

Published Online: 2019-02-19

Published Print: 2019-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Mishra, Shivam https://orcid.org/0000-0001-6414-7632
Balasubramaniam, R.

Chandra, Sudhir
License Information

Text and Data Mining valid from 2019-02-19
More Information

Article History

Received: 29 October 2018

Accepted: 29 January 2019

First Online: 19 February 2019