Influence of residual stress on performance of AlN thin film based piezoelectric MEMS accelerometer structure
Crossref DOI link: https://doi.org/10.1007/s00542-019-04334-1
Published Online: 2019-02-09
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gupta, Nidhi
Pandey, Akhilesh
Vanjari, Siva Rama Krishna
Dutta, Shankar
Text and Data Mining valid from 2019-02-09
Article History
Received: 23 November 2018
Accepted: 29 January 2019
First Online: 9 February 2019