Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators
Crossref DOI link: https://doi.org/10.1007/s00542-019-04416-0
Published Online: 2019-04-01
Published Print: 2022-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Farrugia, Russell http://orcid.org/0000-0002-7477-2383
Portelli, Barnaby
Grech, Ivan
Camilleri, Duncan
Casha, Owen
Micallef, Joseph
Gatt, Edward
Text and Data Mining valid from 2019-04-01
Version of Record valid from 2019-04-01
Article History
Received: 4 September 2018
Accepted: 28 March 2019
First Online: 1 April 2019