Optimal selection of dielectric film in piezoelectric MEMS microphone
Crossref DOI link: https://doi.org/10.1007/s00542-019-04485-1
Published Online: 2019-05-30
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gangidi, Prashant
Gupta, Navneet
Text and Data Mining valid from 2019-05-30
Version of Record valid from 2019-05-30
Article History
Received: 20 December 2018
Accepted: 13 May 2019
First Online: 30 May 2019