Fabrication and characterization of zinc oxide piezoelectric MEMS resonator
Crossref DOI link: https://doi.org/10.1007/s00542-019-04509-w
Published Online: 2019-06-08
Published Print: 2020-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Deshpande, Prasanna P.
Pande, Rajesh S.
Patrikar, Rajendra M.
Text and Data Mining valid from 2019-06-08
Version of Record valid from 2019-06-08
Article History
Received: 18 April 2019
Accepted: 28 May 2019
First Online: 8 June 2019