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Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Published Online: 2019-07-18

Published Print: 2019-12

Authors

Kumar, Ashish

Prasad, Mahanth

Janyani, Vijay

Yadav, R. P.
Funding

Funding for this research was provided by:

Science and Engineering Research Board (EMR/2017/005107)
License Information

Text and Data Mining valid from 2019-07-18

Version of Record valid from 2019-07-18
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Article History

Received: 1 February 2019

Accepted: 13 June 2019

First Online: 18 July 2019

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