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Nonlinear structural behavior of a size-dependent MEMS gyroscope assuming a non-trivial shaped proof mass

Crossref DOI link: https://doi.org/10.1007/s00542-019-04530-z

Published Online: 2019-07-04

Published Print: 2020-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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