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Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements

Crossref DOI link: https://doi.org/10.1007/s00542-019-04561-6

Published Online: 2019-07-27

Published Print: 2020-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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