Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform
Crossref DOI link: https://doi.org/10.1007/s00542-019-04596-9
Published Online: 2019-08-22
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Jinkui
Lou, Wenzhong
Wang, Dakui http://orcid.org/0000-0002-4575-7176
Feng, Hengzhen
Text and Data Mining valid from 2019-08-22
Version of Record valid from 2019-08-22
Article History
Received: 13 February 2019
Accepted: 14 August 2019
First Online: 22 August 2019