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Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer

Crossref DOI link: https://doi.org/10.1007/s00542-019-04613-x

Published Online: 2019-09-04

Published Print: 2020-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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