Characterization of MEMS comb capacitor
Crossref DOI link: https://doi.org/10.1007/s00542-019-04671-1
Published Online: 2019-11-05
Published Print: 2020-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ahmad, Farooq
Baig, Athar
Dennis, John Ojur
Hamid, Nor Hisham Bin
Md Khir, M. Haris Bin
Text and Data Mining valid from 2019-11-05
Version of Record valid from 2019-11-05
Article History
Received: 31 August 2019
Accepted: 25 October 2019
First Online: 5 November 2019