Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation
Crossref DOI link: https://doi.org/10.1007/s00542-019-04705-8
Published Online: 2019-12-02
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Khan, Nabeel
Ahamed, Mohammed Jalal http://orcid.org/0000-0002-3346-6187
Text and Data Mining valid from 2019-12-02
Version of Record valid from 2019-12-02
Article History
Received: 8 November 2019
Accepted: 25 November 2019
First Online: 2 December 2019