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Design and simulation of MEMS based capacitive pressure sensor for harsh environment

Crossref DOI link: https://doi.org/10.1007/s00542-019-04735-2

Published Online: 2020-01-20

Published Print: 2020-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Srinivasa Rao, K. https://orcid.org/0000-0003-1239-5196
Mohitha reddy, B.

Bala Teja, V.

Krishnateja, G. V. S.

Ashok Kumar, P.

Ramesh, K. S.
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Text and Data Mining valid from 2020-01-20

Version of Record valid from 2020-01-20
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Article History

Received: 26 November 2019

Accepted: 19 December 2019

First Online: 20 January 2020