Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film
Crossref DOI link: https://doi.org/10.1007/s00542-020-04821-w
Published Online: 2020-04-04
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kato, A.
Hasegawa, Y.
Taniguchi, K.
Shikida, M.
Text and Data Mining valid from 2020-04-04
Version of Record valid from 2020-04-04
Article History
Received: 26 December 2019
Accepted: 20 March 2020
First Online: 4 April 2020