Development of a low stress RF MEMS double-cantilever shunt capacitive switch
Crossref DOI link: https://doi.org/10.1007/s00542-020-04838-1
Published Online: 2020-04-16
Published Print: 2020-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ansari, Hamid Reza
Kordrostami, Zoheir
Text and Data Mining valid from 2020-04-16
Version of Record valid from 2020-04-16
Article History
Received: 23 February 2020
Accepted: 30 March 2020
First Online: 16 April 2020