Document is current

Any future updates will be listed below

A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application

Crossref DOI link: https://doi.org/10.1007/s00542-020-04890-x

Published Online: 2020-05-30

Published Print: 2020-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark