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Design and verification of a structure for isolating stress in sandwich MEMS accelerometer

Published Online: 2020-08-10

Published Print: 2021-05

Authors

Mo, Yuming

Yang, Jie

Peng, Bo

Xie, Guofen

Tang, Bin
License Information

Text and Data Mining valid from 2020-08-10

Version of Record valid from 2020-08-10
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Article History

Received: 4 July 2020

Accepted: 1 August 2020

First Online: 10 August 2020

Compliance with ethical standards

:

: The authors declare that they have no conflict of interest.

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