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Implementation and experiment of a novel piezoelectric-spring stage for rapid high-precision micromotion

Published Online: 2020-11-27

Published Print: 2021-08

Authors

Zhang, Lanyu https://orcid.org/0000-0002-6439-2619
Gao, Jian
Funding

Funding for this research was provided by:

the National Natural Science Foundation of China (51905108, 51675106)

the Guangdong Provincial Natural Science Foundation (2019A1515011796)
License Information

Text and Data Mining valid from 2020-11-27

Version of Record valid from 2020-11-27
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Article History

Received: 14 September 2020

Accepted: 1 November 2020

First Online: 27 November 2020

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