Growth and properties of sputtered highly (100)-oriented oxygenated AlN thin films for SAW sensing applications
Crossref DOI link: https://doi.org/10.1007/s00542-020-05165-1
Published Online: 2021-01-03
Published Print: 2021-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cunha, CĂcero L. A. http://orcid.org/0000-0002-2555-3459
Pimenta, Tales C.
Fraga, Mariana A.
Text and Data Mining valid from 2021-01-03
Version of Record valid from 2021-01-03
Article History
Received: 27 November 2020
Accepted: 30 November 2020
First Online: 3 January 2021