Crossmark

Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

Crossref DOI link: https://doi.org/10.1007/s00542-021-05217-0

Published Online: 2021-04-29

Published Print: 2021-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Jangra, Mandeep

Arya, Dhairya Singh

Khosla, Robin

Sharma, Satinder K. https://orcid.org/0000-0001-9313-5550
License Information

Text and Data Mining valid from 2021-04-29

Version of Record valid from 2021-04-29
More Information

Article History

Received: 13 September 2020

Accepted: 3 April 2021

First Online: 29 April 2021