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Enhanced 3-axis sensitivity of a CMOS MEMS convective accelerometer using a new power efficient heater structure

Crossref DOI link: https://doi.org/10.1007/s00542-022-05254-3

Published Online: 2022-02-07

Published Print: 2022-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Abdellatif, Sonia https://orcid.org/0000-0001-7862-6001
Mezghani, Brahim https://orcid.org/0000-0002-6626-9817
Mailly, Frederick

Nouet, Pascal https://orcid.org/0000-0003-2137-2623
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Text and Data Mining valid from 2022-02-07

Version of Record valid from 2022-02-07
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Article History

Received: 10 February 2021

Accepted: 20 January 2022

First Online: 7 February 2022