Reliable before-fabrication forecasting of MEMS piezoresistive pressure sensor: mathematical modelling and numerical simulation
Crossref DOI link: https://doi.org/10.1007/s00542-022-05305-9
Published Online: 2022-05-16
Published Print: 2022-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jindal, Sumit Kumar
Patra, Ritayan
Banerjee, Sayak
Paul, Arin
Kanekal, Dadasikandar
Kumar, Ajay
Text and Data Mining valid from 2022-05-16
Version of Record valid from 2022-05-16
Article History
Received: 17 May 2021
Accepted: 15 April 2022
First Online: 16 May 2022