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A compensating method of convex corner in etching of (110) silicon

Crossref DOI link: https://doi.org/10.1007/s00542-022-05377-7

Published Online: 2022-10-01

Published Print: 2022-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Yu, Nam Chol https://orcid.org/0000-0003-2323-8188
Jon, Chung-Hyok

Chu, KyongIl

Ryang, KumJun
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Text and Data Mining valid from 2022-10-01

Version of Record valid from 2022-10-01
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Article History

Received: 17 January 2022

Accepted: 5 September 2022

First Online: 1 October 2022