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The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method

Published Online: 2023-04-24

Published Print: 2023-05

Authors

Liang, Xiaoxiao

Yan, Mingming

Xu, Yuanze

Zhang, Tianchong

Zhang, Dongni

Zhang, Changrui

Wang, Bo

Yi, Futing

Liu, Jing
Funding

Funding for this research was provided by:

national natural science foundation of china (U1832193, 11605226)
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Text and Data Mining valid from 2023-04-24

Version of Record valid from 2023-04-24
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Article History

Received: 12 July 2021

Accepted: 6 April 2023

First Online: 24 April 2023

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