Crossmark

Design of microstrip patch antenna element and array on quartz glass wafer with suspended cavity based on MEMS technology

Published Online: 2023-05-29

Published Print: 2023-06

Authors

Xu, Junjie

Peng, Zhen

Long, Zhiming

Wang, Zhuqing https://orcid.org/0000-0002-7513-5773
Funding

Funding for this research was provided by:

Integrating Perception and Medical Detection Micro-Electromechanical Innovation (0030904151004/016)
License Information

Text and Data Mining valid from 2023-05-29

Version of Record valid from 2023-05-29
More Information

Article History

Received: 7 July 2022

Accepted: 2 May 2023

First Online: 29 May 2023

Declarations

:

: The authors declare no conflict of interest.

Document is current