Correction: Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers
Crossref DOI link: https://doi.org/10.1007/s00542-023-05475-0
Published Online: 2023-06-14
Published Print: 2023-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Zhenyu http://orcid.org/0000-0001-9370-7010
Zhu, Yusi
Du, Lidong
Zhao, Zhan
Fang, Zhen
Text and Data Mining valid from 2023-06-01
Version of Record valid from 2023-06-01
Article History
First Online: 14 June 2023
Free to read: This content has been made available to all.