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Retraction Note: A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

Published Online: 2023-05-29

Published Print: 2023-06

Authors

Marsi, Noraini

Majlis, Burhanuddin Yeop

Hamzah, Azrul Azlan

Mohd-Yasin, Faisal
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Text and Data Mining valid from 2023-05-29

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First Online: 29 May 2023

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