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The combined effects of temperature and relative humidity on resonant frequency and quality factor of MEMS beam resonators in atmospheric pressure and gas rarefaction

Crossref DOI link: https://doi.org/10.1007/s00542-023-05514-w

Published Online: 2023-07-31

Published Print: 2023-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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