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An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent

Published Online: 2023-10-11

Published Print: 2024-10

Authors

Ghosh Dastidar, Avik

Maity, Reshmi

Tiwari, R. C.

Dutta, Shankar

Maity, Niladri Pratap
Funding

Funding for this research was provided by:

DRDO (DFTM//07/3609/NESTC/MEMS/P-01)
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Text and Data Mining valid from 2023-10-11

Version of Record valid from 2023-10-11
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Article History

Received: 14 March 2023

Accepted: 19 September 2023

First Online: 11 October 2023

Document is current