Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-023-05604-9
Published Online: 2024-01-30
Published Print: 2024-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ghasemi, Salar https://orcid.org/0009-0009-7075-2690
Sotoudeh, Behzad
Pazhooh, Mehdi
Text and Data Mining valid from 2024-01-30
Version of Record valid from 2024-01-30
Article History
Received: 14 July 2023
Accepted: 24 December 2023
First Online: 30 January 2024