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Fatigue lifetime evaluation of polysilicon thin films by using cyclic loading with gradually increasing amplitude

Crossref DOI link: https://doi.org/10.1007/s00542-024-05612-3

Published Online: 2024-02-21

Published Print: 2024-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Vu, Huy Le https://orcid.org/0000-0003-3406-4005
Gaspar, Joao

Paul, Oliver

Kamiya, Shoji
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Text and Data Mining valid from 2024-02-21

Version of Record valid from 2024-02-21
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Article History

Received: 9 March 2022

Accepted: 5 January 2024

First Online: 21 February 2024