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Authors
Uhlig, Sebastian https://orcid.org/0000-0002-5102-8105
Gaudet, Matthieu
Langa, Sergiu
Ruffert, Christine
Jongmanns, Marcel
Schenk, Harald
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Funding
Funding for this research was provided by:
EFRE (85004248)
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
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Article History
Received: 18 May 2022
Accepted: 14 March 2024
First Online: 9 April 2024
