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Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

Published Online: 2024-04-26

Published Print: 2024-12

Authors

Wu, Gaohua

Li, Guoping

Yang, Yiling https://orcid.org/0000-0001-9771-850X
Wei, Yanding
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51975517)

National Natural Science Foundation of China (51805276)

Zhejiang Provincial Natural Science Foundation of China (LY22E050002)

Ningbo City Natural Science Foundation of China (2022J133)

K.C. Wong Magna Fund in Ningbo University
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Text and Data Mining valid from 2024-04-26

Version of Record valid from 2024-04-26
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Article History

Received: 14 March 2021

Accepted: 17 August 2023

First Online: 26 April 2024

Declarations

:

: The author(s) declared no potential conflicts of interest with respect to the research, authorship, and/or publication of this article.

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