Metal gate work function engineering for nano-scaled trigate FinFET
Crossref DOI link: https://doi.org/10.1007/s00542-024-05706-y
Published Online: 2024-06-28
Published Print: 2025-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lalruatfela, Michael
Panchanan, Suparna
Maity, Reshmi
Maity, Niladri Pratap
Text and Data Mining valid from 2024-06-28
Version of Record valid from 2024-06-28
Article History
Received: 16 January 2024
Accepted: 5 June 2024
First Online: 28 June 2024
Declarations
:
: The authors declare no competing interests.