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Enhancing output pressure of capacitive micromachined ultrasonic transducers (CMUTs): a comparative FEM study of different pressure-boosting methods

Crossref DOI link: https://doi.org/10.1007/s00542-025-05900-6

Published Online: 2025-07-03

Published Print: 2025-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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