Structural optimization on MEMS z-axis accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-025-05924-y
Published Online: 2025-09-29
Published Print: 2025-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kalaiselvi, S.
Sujatha, L.
Sundar, R.
Text and Data Mining valid from 2025-09-29
Version of Record valid from 2025-09-29
Article History
Received: 5 March 2025
Accepted: 21 July 2025
First Online: 29 September 2025
Declarations
:
: The authors declare no competing interests.