Design and simulation of a MEMS decoupled single proof mass three-axis capacitive accelerometer with ultra-low cross-axis error
Crossref DOI link: https://doi.org/10.1007/s00542-025-05926-w
Published Online: 2025-08-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pazhooh, Mehdi
Ghasemi, Salar
Text and Data Mining valid from 2025-08-09
Version of Record valid from 2025-08-09
Article History
Received: 28 March 2024
Accepted: 24 July 2025
First Online: 9 August 2025
Declarations
:
: The authors declare no competing interests.