Nonlinearity reduction in MEMS resonators based on design of H-shaped beams
Crossref DOI link: https://doi.org/10.1007/s00707-022-03340-1
Published Online: 2022-10-04
Published Print: 2022-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhou, Chunyan
Fu, Qing
Zhang, Xinxi
Zhao, Qiancheng
Text and Data Mining valid from 2022-10-04
Version of Record valid from 2022-10-04
Article History
Received: 7 June 2022
Revised: 5 August 2022
Accepted: 15 August 2022
First Online: 4 October 2022