Varying internal parameters in the thermal silicon oxidation
Crossref DOI link: https://doi.org/10.1007/s10008-019-04335-0
Published Online: 2019-07-27
Published Print: 2019-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maser, K.
Text and Data Mining valid from 2019-07-27
Version of Record valid from 2019-07-27
Article History
Received: 15 May 2019
Revised: 15 May 2019
Accepted: 1 July 2019
First Online: 27 July 2019