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Fabrication of micro-sized-copper column array through localized electrochemical deposition using 20-μm-diameter micro-anode

Published Online: 2022-01-30

Published Print: 2022-03

Authors

Wang, Fuliang https://orcid.org/0000-0003-1725-4827
Hua, Bingli

Niu, Qibin
Funding

Funding for this research was provided by:

the State Key Laboratory of High Performance Complex Manufacturing (ZZYJKT2019-10)

the Innovation-Driven Project of CSU (2020CX005)
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Text and Data Mining valid from 2022-01-30

Version of Record valid from 2022-01-30
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Article History

Received: 14 September 2021

Revised: 29 November 2021

Accepted: 29 November 2021

First Online: 30 January 2022

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